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HomeResearch2024.04.05 Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway

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2024.04.05 Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway


Authors :  
Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, Hideo Hosono
Title :    Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway
DOI :     10.1021/acsnano.4c02101
Jounal :    ACS Nano


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