Research

2024.04.05　Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway

Authors :　　^{Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, Hideo Hosono}
Title :　　 　Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway
DOI :　　 　 10.1021/acsnano.4c02101
Jounal : 　　 ACS Nano