Research
2024.04.05 Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway
Authors : Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, Hideo Hosono
Title : Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway
DOI : 10.1021/acsnano.4c02101
Jounal : ACS Nano