HomeResearch2024.04.05 Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway
Research
2024.04.05 Approach to Low Contact Resistance Formation on Buried Interface
in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway
Authors : Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, Hideo
Hosono Title : Approach to Low Contact Resistance Formation on Buried Interface in Oxide TFTs: Utilization of Palladium-Mediated Hydrogen Pathway DOI :10.1021/acsnano.4c02101
Jounal : ACS Nano